Scaling in VLSI refers to the reduction of the size or dimensions of MOSFETs. It is an important part of VLSI design to boost the success path of the VLSI industry, resulting in denser and faster integration of devices. There are different types of scaling, including constant voltage scaling, constant field scaling, and lateral scaling. The advantages of scaling in MOSFET include improved packaging density, reduced power dissipation, and improved performance features such as speed and application. The scaling factor is used to scale all parameters of the MOSFET, such as gate length, device voltages, and doping concentration densities. The supply voltage is scaled in constant field scaling, but the electric field remains constant. The benefits of scaling include increased circuit speed and reduced power consumption.